• 论文 •    

基于鼓-缓冲器-绳子理论的半导体晶圆厂车间层控制

郭永辉,钱省三   

  1. 上海理工大学 微电子发展研究中心,上海  200093
  • 收稿日期:2004-11-02 修回日期:2004-12-21 出版日期:2006-01-15 发布日期:2006-01-25

Shop floor control in wafer fabrication based on drum-buffer-rope theory

GUO Yong-hui, QIAN Xing-san   

  1. Cent. of Microelectronics Dev., Univ. of Shanghai for S&T, Shanghai  200093, China
  • Received:2004-11-02 Revised:2004-12-21 Online:2006-01-15 Published:2006-01-25

摘要: 为了将鼓-缓冲器-绳子理论应用于带回流的半导体晶圆厂车间的作业控制,通过设置回流缓冲,对传统鼓-缓冲器-绳子理论进行了修正,提出了一套适合带回流生产线的生产作业方法。针对瓶颈资源上的负荷堆积情况,提出了基于EDD和CR法则的推平原则,将瓶颈负荷推平。负荷推平后,根据瓶颈设备的实际可用情况,对瓶颈设备上的生产安排进行合理化,得到各订单的投料时间及出货时间安排。算例结果证明了该方法的可行性和有效性。

关键词: 鼓-缓冲器-绳子理论, 晶圆制造, 回流, 缓冲设置, 生产控制

Abstract: To apply the Drum-Buffer-Rope (DBR) theory to shop floor control in re-entrant flow wafer fabrication, with the deployment of re-entrant buffer, the traditional DBR theory was modified. A production control approach suitable for re-entrant lines was proposed. As a make-to-order company, many orders were processed in the mean time in the manufacturing line and load ruin was formed before the bottlenecks. To level the load ruin, the leveling principles based on Earliest Due Date (EDD) and Critical Ratio (CR) rules were presented. After the load ruin was leveled, the Drum was rationalized according to the practical process conditions of the bottlenecks. Finally, the orders release plan and shipping plan were determined. The results of experiment showed the feasibility and validity of this approach.

Key words: drum-buffer-rope theory, wafer manufacturing, re-entrant, buffer deployment, production control

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