• 论文 •    

基于模糊规则的半导体生产线队列排序算法

王令群,郑应平,潘石柱   

  1. 同济大学 控制科学与工程系,上海  200092
  • 收稿日期:2004-11-02 修回日期:2004-12-21 出版日期:2006-02-15 发布日期:2006-02-25
  • 基金资助:
    国家自然科学基金资助项目(20002CB312202-03,60374005,60343002)

New algorithm for VLSI production sequencing problems based on fuzzy rule

WANG Ling-qun, ZHENG Ying-ping, PAN Shi-zhu   

  1. Dep. of Control Sci. & Eng., Tongji Univ., Shanghai  200092, China
  • Received:2004-11-02 Revised:2004-12-21 Online:2006-02-15 Published:2006-02-25
  • Supported by:
    Project supported by the National Natural Science Foundation,China(No.20002CB312202-03,60374005,60343002).

摘要: 为提高芯片的成品率、按期交货率和机器利用率,以及减少平均加工时间,提出了一种工件排序的算法。在该算法中,为提高机器利用率和减少工件平均加工时间,采用了通过排序减少瓶颈机器切换时间的方法;为提高芯片的成品率,引入一时限参数,避免工件在加工过程中因在空气中暴露时间过长而氧化作废;为确保按期交货,在调度过程中运用模糊规则方法确定工件在队列中的具体位置。实验表明,该算法可明显提高产品的成品率,其总体性能优于其他常用算法。

关键词: 半导体生产线, 多目标, 模糊规则

Abstract: In order to improve finished products rate of chips, on-time consignment rate, machines utilization rate and to reduce average production time, a jobs-queue algorithm was presented. With this algorithm, switch time among bottleneck machines were reduced by queuing so as to increase machine utilization rate and reduce average production time. To improve finished products rate of chips, a parameter was introduced to ensure that the jobs would not be oxidized to damage due to long time exposure in air during production. And delivery time was ensured through defining specific location of the job in the queue by fuzzy rules. Experimental results indicated that finished products rate could be dramatically improved and the algorithm exceeded other methods in overall performance.

Key words: semiconductor manufacturing line, multi-object, fuzzy rule

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