关键词: 半导体制造, 多集束型装备, 双臂机械手, 缓冲加工模块, 并行机

Abstract: To deal with the activity sequence of robot and the throughout analysis which were crucial for multi-cluster tools scheduling in semiconductor manufacturing, the k wafer cycle sequence problem in multi-cluster tools scheduling was studied. The lower bound of per wafer cycle time for k wafer cycle sequence was proved. The policy of k wafer cycle sequence and its construction algorithm were proposed, and the expression of per wafer cycle time was derived by the proposed algorithm. Finally, the superiority and the practical value of the mentioned policy were validated by the simulation results and the practical data from a Chinese Track manufacturing company.

Key words: semiconductor manufacturing, multiple-cluster tools, dual-blade robot, buffer process modules, parallel machines, scheduling