关键词: 组合设备, 故障响应, Petri网, 晶圆制造

Abstract: Processing modules in cluster tools were prone to failure and thus it was important to have effective failure response policy. By analyzing single-arm cluster tools with parallel processing module flow pattern and strict wafer residency time constraints, a Petri net model was constructed. This model could not only express the steady state behavior of the system but also the transient behavior. Based on it, schedulability was analyzed whenever any one of the parallel modules for an operation failed. If it was schedulable, effective control policies were presented to keep the system in operation so that no wafer residency time constraint was violated. Examples were presented to show the feasibility of the proposed control policies.

Key words: cluster tools, failure response, Petri nets, semiconductor fabrication