关键词: 晶圆制造, 自动化物料运输系统, 性能分析模型, 排队网络

Abstract: To rapidly and effectively analyzing performances of wafer fabrication Automated Material Handling System (AMHS) so as to get optimized design scheme,a performance analyzing model based on queueing network was proposed.In the model,by considering the multi-vehicle blocking characteristic,multi-vehicle's transporting on automated material handling system's closed-loop tracks was represented as queueinng network process,and virtual units was taken to describe AMHS's multi-shortcut features to improve accuracy of performance analyzing model.With production data from a wafer fabrication enterprise,the proposed performance analyzing model was validated and compared with simulation model.The result showed that the 97% relative errors between the proposed model and simulation model was in range of［-7%,9%］on the performance indexes such as vehicle's utilization ratio,AMHS's movement and interval of vehicle's mean arrival time.However,computing efficiency of the proposed model was significantly higher than that of the simulation model.

Key words: wafer fabrication, automated material handling system, performance analyzing model, queueing network