关键词: 自动化组合设备, 重入加工, 建模与仿真, eM-Plant

Abstract: With the increase of wafer diameter,small lot size and multi-product manufacturing,there were more and more switches between transient processes and steady states.To meet the requirements of large wafer manufacturing and to improve the machining performance of cluster tool,the research for transient processes of dual-arm cluster tools in wafer fabrication with wafer revisiting was meaningful.Since there was no buffer between the process modules in a cluster tool,it was difficult to schedule a cluster tool.Based on eM-Plant platform,a simulation system for a dual-arm cluster tool with a wafer revisiting was developed to analyze the start-up transient processes from idle state to steady state.An illustrative example was given to show the effectiveness of proposed method.

Key words: cluster tool, revisiting processing, modeling and simulation, eM-Plant