Abstract: To solve problems of residency and reentrant constraints of cluster tools in running process effectively, a scheduling algorithm was put forward. The problem domain of describing scheduling was structured. Makespan minimizing was taken as optimization objective to set up mathematical models. On this basis, a feasible path search scheduling method of robotic operations was proposed. Combined with the characteristics of residency and reentrant constraints, a scheduling heuristic algorithm was built for cluster tools with three processing chambers.The simulation experiments were designed to evaluate the effectiveness and feasibility of proposed algorithm.

Key words: cluster tools, scheduling, residency constraints

摘要： 为有效地解决集束型设备加工过程中存在的驻留与重入约束问题，构建了带驻留与重入约束的集束型设备调度算法。首先进行调度问题域的描述，以系统Makespan最小为优化目标，建立了数学模型。在此基础上，提出一种搜索可行机械手运行路径的调度方法，结合驻留与重入约束的特征，构建了三个加工腔的集束型设备调度启发式算法。最后对算法进行了仿真实验，结果表明了该算法的有效性和可行性。

关键词: 集束型设备, 调度, 驻留约束, 重入, 总完工时间